Open Access
Issue
J. Eur. Opt. Soc.-Rapid Publ.
Volume 5, 2010
Article Number 10053
Number of page(s) 7
DOI https://doi.org/10.2971/jeos.2010.10053
Published online 23 September 2010
  1. ITRS International Technology Roadmap for Semiconductors, 2005 Edition, Lithography http://www.itrs.net/Links/2005ITRS/Litho2005.pdf [Google Scholar]
  2. M. Wurm, B. Bodermann, and W. Mirandé, “Evaluation of scatterometry tools for critical dimension metrology” DGaO Proc. 106, (2005). [Google Scholar]
  3. H. Gross, R. Model, M. Bär, M. Wurm, B. Bodermann, and A. Rathsfeld, “Mathematical modelling of indirect measurements in scatterometry” Measurement 39, 782–794 (2006). [NASA ADS] [CrossRef] [Google Scholar]
  4. J. Perlich, F.-M. Kamm, J. Rau, F. Scholze, and G. Ulm, “Characterization of extreme ultraviolet masks by extreme ultraviolet scatterometry” J. Vac. Sci. Technol. B22, 3059–3062 (2004). [NASA ADS] [CrossRef] [Google Scholar]
  5. J. Pomplun, S. Burger, F. Schmidt, F. Scholze, C. Laubis, and U. Dersch, “Finite element analysis of EUV scatterometry” Proc. SPIE 6617, 18–21 (2007). [Google Scholar]
  6. D. Colton, and R. Kress, Inverse Acoustic and Electromagnetic Scattering Theory (Second Edition, Springer-Verlag, New York 1998). [CrossRef] [Google Scholar]
  7. J. Elschner, and M. Yamamoto, “An inverse problem in periodic diffractive optics: Reconstruction of Lipschitz grating profiles” Appl. Anal. 81, 1307–1328 (2002). [Google Scholar]
  8. H. Gross, A. Rathsfeld, F. Scholze, and M. Bär, “Profile reconstruction in extreme ultraviolet (EUV) scatterometry: modeling and uncertainty estimates” Meas. Sci.Technol. 20, 105102 (2009). [CrossRef] [Google Scholar]
  9. H. Gross, and A. Rathsfeld, “Sensitivity analysis for indirect measurement in scatterometry and the reconstruction of periodic grating structures” Wave. Random Complex 18, 129–149 (2008). [NASA ADS] [CrossRef] [Google Scholar]
  10. J. Elschner, R. Hinder, and G. Schmidt, “Finite element solution of conical diffraction problems” Adv. Comput. Math. 16, 139–156 (2002). [CrossRef] [Google Scholar]
  11. G. Bao, “Finite element approximation of time harmonic waves in periodic structures” SIAM J. Numer. Anal. 32, 1155–69 (1995). [CrossRef] [Google Scholar]
  12. J. Nocedal, and S. J. Wright, Numerical optimization (Springer Verlag, New-York, 2000). [Google Scholar]
  13. R. M. Alassaad, and D. M. Byrne, “Error Analysis in Inverse Scatterometry I: Modeling” J. Opt. Soc. Am. A 24, 326–338 (2007). [NASA ADS] [CrossRef] [Google Scholar]
  14. DIPOG Homepage http://www.wias-berlin.de/software/DIPOG [Google Scholar]
  15. O. Cessenat, and B. Depres, “Application of an ultra weak variational formulation of elliptic PDEs to the two-dimensional Helmholtz problem” SIAM J. Numer. Anal. 35, 255–299 (1998). [CrossRef] [MathSciNet] [Google Scholar]
  16. J. Pomplun, and F. Schmidt, “Reduced basis method for fast and robust simulation of electromagnetic scattering problems” Proc. SPIE 7390, 73900I (2009). [NASA ADS] [CrossRef] [Google Scholar]
  17. Joint Committee for Guides in Metrology BIPM, IEC, IFCC, ILAC, ISO, IUPAC, IUPAP, and OIML, “Evaluation of measurement data – Supplement 1” in Guide to the expression of uncertainty in measurement - Propagation of distributions using a Monte Carlo method (Bureau International des Poids et Mesures JCGM 101, 2008). [Google Scholar]
  18. T. A. Germer, H. J. Patrick, R. M. Silver, and B. Bunday, “Developing an uncertainty analysis for optical scatterometry” Proc. SPIE 7272, 72720T (2009). [NASA ADS] [CrossRef] [Google Scholar]
  19. A. Kato, and F. Scholze, “The effect of line roughness on the reconstruction of line profiles for EUV masks from EUV scatterometry” Proc. SPIE 7636, 76362I (2010). [NASA ADS] [Google Scholar]

Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.

Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.

Initial download of the metrics may take a while.