Issue |
J. Eur. Opt. Soc.-Rapid Publ.
Volume 8, 2013
|
|
---|---|---|
Article Number | 13048 | |
Number of page(s) | 8 | |
DOI | https://doi.org/10.2971/jeos.2013.13048 | |
Published online | 17 July 2013 |
Regular papers
Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanning
1
Optics Research Group, Department of Imaging Science and Technology, Faculty of Applied Sciences, Delft University of Technology, P. O. Box 5046, 2600GA Delft, The Netherlands
2
VSL Dutch Metrology Institute, Thijsseweg 11, 2600 AR Delft, The Netherlands
Received:
7
May
2013
Revised:
25
June
2013
Non-interferometric phase retrieval from the intensity measurements in Coherent Fourier Scatterometry (CFS) is presented using a scanning focused spot. Formulae to determine the state of polarization of the scattered light and to retrieve the phase difference between overlapping scattered orders are given. The scattered far field is rigorously computed and the functionality of the method is proved with experimental results.
Key words: Optical metrology / scatterometry / RCWA / coherent Fourier scatterometry / grating / phase retrieval / temporal phase shifting interferometry
© The Author(s) 2013. All rights reserved.
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