Open Access
Issue |
J. Eur. Opt. Soc.-Rapid Publ.
Volume 17, Number 1, 2021
|
|
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Article Number | 1 | |
Number of page(s) | 13 | |
DOI | https://doi.org/10.1186/s41476-020-00143-6 | |
Published online | 04 January 2021 |
- Klocek P, Handbook of Infrared Optical Materials (1991) New YorkCRC Press [Google Scholar]
- Yin Z, Yi Z, Direct polishing of aluminium mirrors with higher quality and accuracy. Appl. Optics (2015) 54, 7835–7841. https://doi.org/10.1364/AO.54.007835 [NASA ADS] [CrossRef] [Google Scholar]
- Delplancke F, Nijenhuis J, de Man H, Andolfato L, Treichel R, Hopman J, Derie F, Star separator system for the dual-field capability (PRIMA) of the VLTI. Proc. SPIE-Int. Soc. Opt. Eng. (2004) 5491, 1528–1535. https://doi.org/10.1117/12.551873 [Google Scholar]
- ter Horst R, Tromp N, de Haan M, Navarro R, Venema L, Pragt J, Directly polished lightweight aluminium mirror. Proc. SPIE-Int. Soc. Opt. Eng. (2017) 105660P, 10566. https://doi.org/10.1117/12.2308200 [Google Scholar]
- Kinast J, Schlegel R, Kleinbauer K, Steinkopf R, Follert R, Dorn RJ, Lizon JL, Hatzes A, Tünnermann A, Manufacturing of aluminum mirrors for cryogenic applications. Proc. SPIE-Int. Soc. Opt. Eng. (2018) 10706, 107063G. https://doi.org/10.1117/12.2313126 [Google Scholar]
- Supranowitz C, Hall C, Dumas P, Hallock B, Improving surface figure and microroughness of IR materials and diamond turned surfaces with magnetorheological finishing (MRF). Proc. SPIE-Int. Soc. Opt. Eng. (2007) 6545, https://doi.org/10.1117/12.719792 [Google Scholar]
- Folkman SL, Characterization of electroless nickel plating on aluminum mirrors. Proc. SPIE-Int Soc. Opt. Eng. (2002) 4771, 254–264. https://doi.org/10.1117/12.482167 [Google Scholar]
- Bauer J, Frost F, Arnold T, Reactive ion beam figuring of optical aluminium surfaces. J. Phys. D Appl. Phys. (2017) 50, 8https://doi.org/10.1088/1361-6463/50/8/085101 [CrossRef] [Google Scholar]
- Bauer J, Frost F, Lehmann A, Ulitschka M, Li Y, Arnold T, Finishing of metal optics by ion beam technologies. Optim. Eng. (2019) 58, 9092612. https://doi.org/10.1117/1.OE.58.9.092612 [NASA ADS] [Google Scholar]
- Bauer J, Ulitschka M, Pietag F, Arnold T, Improved ion beam tools for ultraprecision figure correction of curved aluminum mirror surfaces. J. Astron. Telesc. Instrum. Syst. (2018) 4, 4https://doi.org/10.1117/1.JATIS.4.4.046003 [Google Scholar]
- Ulitschka M, Bauer J, Frost F, Arnold T, Reactive ion beam etching-based planarization of optical aluminium surfaces. Proc. SPIE-Int. Soc. Opt. Eng. (2019) 11032, 110320D. https://doi.org/10.1117/12.2513670 [Google Scholar]
- Bauer, J., Ulitschka, M., Frost, F., Arnold, T.: Figuring of optical aluminium devices by reactive ion beam etching. EPJ Web Conf. 215(6002), (2019). https://doi.org/10.1051/epjconf/201921506002 [Google Scholar]
- Nobes MJ, Colligon JS, Carter G, The equilibrium topography of sputtered amorphous solids. J. Mater. Sci. (1969) 4, 730–733. https://doi.org/10.1007/BF02403410 [NASA ADS] [CrossRef] [Google Scholar]
- Carter G, Colligon JS, Nobes MJ, The equilibrium topography of sputtered amorphous solids II. J. Mater. Sci. (1971) 6, 115–117. https://doi.org/10.1007/BF00550340 [NASA ADS] [CrossRef] [Google Scholar]
- Carter G, Nobes MJ, Whitton JL, The stability of equilibrium surface topography developed by sputtering. J. Mater. Sci. (1978) 13, 2725–2728. https://doi.org/10.1007/BF02402765 [NASA ADS] [CrossRef] [Google Scholar]
- Carter G, The physics and applications of ion beam erosion. J. Phys. D Appl. Phys. (2001) 34, R1–R22. https://doi.org/10.1088/0022-3727/34/3/201 [CrossRef] [Google Scholar]
- Carter G, Nobes MJ, Katardjiev IV, Sputter polishing of surfaces. Phil. Mag (1992) B 66, 419–425. https://doi.org/10.1080/13642819208207660 [NASA ADS] [CrossRef] [Google Scholar]
- Ulitschka, M., Bauer, J., Frost, F., Arnold, T.: Local smoothing of optical aluminium surfaces by reactive ion beam etching. Optim. Eng. under review. 59(3), 035108 (2020). https://doi.org/10.1117/1.OE.59.3.035108 [Google Scholar]
- Johnson LF, Ingersoll KA, Kahng D, Planarization of patterned surfaces by ion beam erosion. Appl. Phys. Lett. (1982) 40, 636–638. https://doi.org/10.1063/1.93172 [NASA ADS] [CrossRef] [Google Scholar]
- Johnson LF, Ingersoll KA, Ion polishing with the aid of a planarizing film. Appl. Optics (1983) 22, 1165–1167. https://doi.org/10.1364/AO.22.001165 [NASA ADS] [CrossRef] [Google Scholar]
- Ulitschka M, Bauer J, Frost F, Arnold T, Ion beam planarization of optical aluminium surfaces. J. Astron. Telesc. Instrum. Syst. (2020) 6, 1https://doi.org/10.1117/1.JATIS.6.1.014001 [CrossRef] [Google Scholar]
- Gubbels G, Tegelaers L, Senden R, Melt spun aluminium alloys for moulding optics. Proc. SPIE-Int Soc. Opt. Eng. (2013) 8884, https://doi.org/10.1117/12.2030181 [Google Scholar]
- The Scanning Probe Image Processor SPIP™, Image metrology, Denmark, https://www.imagemet.com/products/spip/. Accessed 11 Dec 2019 [Google Scholar]
- Thedsakhulwong A, Locharoenrat K, Thowladda W, Nitrogen concentrations on structural and optical properties of aluminum nitride films deposited by reactive RF-magnetron sputtering. Adv. Mat. Res. (2013) 631-632, 186–191. https://doi.org/10.4028/www.scientific.net/AMR.631-632.186 [Google Scholar]
- Bennett HE, Porteus JO, Relation between surface roughness and specular reflectance at normal incidence. J. Opt. Soc. Am. (1961) 51, 123–129. https://doi.org/10.1364/JOSA.51.000123 [NASA ADS] [CrossRef] [Google Scholar]
- Harvey JE, Thompson AK, Scattering effects from residual optical fabrication errors. Proc. SPIE-Int. Soc. Opt. Eng. (1995) 2576, 155–174. https://doi.org/10.1117/12.215588International Conference on Optical Fabrication and Testing [Google Scholar]
- McCune RC, Donlon WT, Plummer HK, Toth L, Kunz FW, Characterization of surface layers produced by ion implantation of nitrogen in bulk aluminium. Thin Solid Films (1989) 168, 263. https://doi.org/10.1016/0040-6090(89)90012-6and references therein [NASA ADS] [CrossRef] [Google Scholar]
- Sanghera HK, Sullivan JL, Saied SO, A study of nitrogen implantation in aluminium-a comparison of experimental results and computer simulation. Appl. Surf. Sci. (1999) 141, 1-257–76. https://doi.org/10.1016/S0169-4332(98)00618-7 [NASA ADS] [CrossRef] [Google Scholar]
- Möller W, Parascandola S, Telbizova T, Günzel R, Richter E, Surface processes and diffusion mechanisms of ion nitriding of stainless steel and aluminium. Surf. Coat. Technol. (2001) 136, 73–79. https://doi.org/10.1016/S0257-8972(00)01015-X [CrossRef] [Google Scholar]
- Netterfield RP, Müller K-H, McKenzie DR, Goonan MJ, Martin PJ, Growth dynamics of aluminum nitride and aluminum oxide thin films synthesized by ion-assisted deposition. Appl. Phys. (1988) 63, 3760–769. https://doi.org/10.1063/1.340068 [NASA ADS] [CrossRef] [Google Scholar]
- Taylor JA, Rabalais JW, Reaction of N2+ beams with aluminum surfaces. J. Chem. Phys. (1981) 75, 1735. https://doi.org/10.1063/1.442251 [NASA ADS] [CrossRef] [Google Scholar]
- Espinós JP, González-Elipe AR, Mohai M, Bertóti I, Surface chemical effects of low-energy N2+ ion bombardment on single crystalline α-Al2O3. Surf. Interface Anal. (2000) 30, 90–94. https://doi.org/10.1002/1096-9918(200008)30:1<90::AID-SIA796>3.0.CO;2-Q [CrossRef] [Google Scholar]
- Yeh C-T, Tuan W-H, Oxidation mechanism of aluminium nitride revisited. J. Adv. Ceram. (2017) 6, 127–32. https://doi.org/10.1007/s40145-016-0213-1 [CrossRef] [Google Scholar]
- Dutta I, Mitra S, Oxidation of sintered aluminium nitride at near-ambient temperatures. J. Am. Ceram. Soc. (1992) 75, 113149–3153. https://doi.org/10.1111/j.1151-2916.1992.tb04403.x [CrossRef] [Google Scholar]
- Yue R, Wang Y, Wang Y, Chen C, SIMS study on the initial oxidation process of AlN ceramic substrate in the air. Appl. Surf. Sci. (1999) 148, 1-273–78. https://doi.org/10.1016/S0169-4332(99)00128-2 [NASA ADS] [CrossRef] [Google Scholar]
- Korbutowicz R, Zakrzewski A, Rac-Rumijowska O, Stafiniak A, Vincze A, Oxidation rates of aluminium nitride thin films: effect of composition of the atmosphere. J. Mater. Sci. Mater. Electron. (2017) 28, 13937–13949. https://doi.org/10.1007/s10854-017-7243-5 [CrossRef] [Google Scholar]
- Yamamura Y, Tawara H, Energy dependence of ion-induced sputtering yields from monoatomic solids at normal incidence. At. Data Nucl. Data Tables (1996) 62, 2149–253. https://doi.org/10.1006/adnd.1996.0005 [NASA ADS] [CrossRef] [Google Scholar]
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