Issue |
J. Eur. Opt. Soc.-Rapid Publ.
Volume 17, Number 1, 2021
|
|
---|---|---|
Article Number | 1 | |
Number of page(s) | 13 | |
DOI | https://doi.org/10.1186/s41476-020-00143-6 | |
Published online | 04 January 2021 |
Research
Improvement of the optical properties after surface error correction of aluminium mirror surfaces
1
Leibniz Institute of Surface Engineering (IOM), Permoserstr. 15, 04318, Leipzig, Germany
2
Technische Universität Dresden, Institute of Manufacturing Science and Engineering, 01069, Dresden, Germany
Received:
27
January
2020
Accepted:
14
August
2020
Ion beam finishing techniques of aluminium mirrors have a high potential to meet the increasing demands on applications of high-performance mirror devices for visible and ultraviolet spectral range. Reactively driven ion beam machining using oxygen and nitrogen gases enables the direct figure error correction up to 1 μm machining depth while preserving the initial roughness. However, the periodic turning mark structures, which result from preliminary device shaping by single-point diamond turning, often limit the applicability of mirror surfaces in the short-periodic spectral range. Ion beam planarization with the aid of a sacrificial layer is a promising process route for surface smoothing, resulting in successfully reduction of the turning mark structures. A combination with direct surface smoothing to perform a subsequent improvement of the microroughness is presented with a special focus on roughness evolution, chemical composition, and optical surface properties. As a result, an ion beam based process route is suggested, which allows almost to recover the reflective properties and an increased long-term stability of smoothed aluminium surfaces.
Key words: Aluminium / Ion beam etching / Mirrors / Oxygen / Nitrogen / Ion beam smoothing
© The Author(s) 2020
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