Open Access
Issue
J. Eur. Opt. Soc.-Rapid Publ.
Volume 11, 2016
Article Number 16012
Number of page(s) 5
DOI https://doi.org/10.1051/jeos.2016.16012
Published online 23 February 2016
  1. S. Hwa, and R. Miller Chemical Mechanical Polishing in Silicon Processing (Academic Press, San Diego, 1999). [Google Scholar]
  2. J. Bliedtner, G. Gräfe, and R. Hector Optical Technology (McGraw-Hill, New York, 2011). [Google Scholar]
  3. E. Brinksmeier, O. Riemer, and A. Gessenharter “Finishing of structured surfaces by abrasive polishing,” Precis. Eng. 30, 325–336 (2006). [CrossRef] [Google Scholar]
  4. R. Boerret, A. Kelm, H. Thiess, and V. Giggel “ASPHERO5 - simulation and analysis of the aspherical polishing process,” Key Eng. Mat. 364, 488–492 (2008). [Google Scholar]
  5. M. Speich, W. Rimkus, R. Börret, and D. K. Harrison, “Materialabtrag beim Polieren - Finite Elemente Simulation und Versuch,” in Proceedings to 11th LS-Dyna Forum (DYNAmore, Ulm, 2012). [Google Scholar]
  6. F. W. Preston, “The Theory and Design of Plate Glass Polishing Machines,” Journal of the society of glass technology, (1927). [Google Scholar]
  7. R. Boerret, J. Raab, and M. Speich, “Mould production for polymer optics,” Proc. SPIE 9192, 91921L (2014). [NASA ADS] [CrossRef] [Google Scholar]

Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.

Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.

Initial download of the metrics may take a while.