Confocal microsphere-assisted topography measurements of grating structures on the linewidth/pitch standard. Reconstructed surface data is shown for a period length of a) Λ₁ = 260 nm and b) Λ₂ = 300 nm. The limited field of view induced by the microspheres (SiO₂, diameter d = 5 μm) is visible as a circular cut-out of the measurement area. The additional magnification introduced by the microsphere leads to enlarged period lengths in the measurement results.