Fig. 3

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Slice of an image stack acquired with confocal microscopy (a) compared to a conventional microscopic image (b) of the same field of view. The area used for the surface reconstruction shown in Figure 4 is marked in red. The complete image section shows one of the squarely arranged structures on the measurement object (supracon linewidth/pitch standard, Λ2 = 300 nm) with the microspheres placed on it. The focal plane is selected so that the focus is visible through the microspheres. (Note that in (b) the colorbar of the image is heavily adapted to make the red-marked area sufficiently visible).
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