Open Access
Table 1
Comparison of the imaging ellipsometry and the white light interference microscopy techniques.
| Imaging ellipsometry | White light interference microscopy | |
|---|---|---|
| Sample preparation | None | None |
| Non-destructive | Yes | Yes |
| Scanning | Yes | Yes |
| Measurement of optical/dielectric properties | Yes | Yes |
| Topography investigation | No | Yes |
| Angle of incidence* | Variable | Normal incidence |
| 38°–90° | 0° | |
| Lateral imaging resolution for used experimental setups (50× objectives)* | 1 μm | < 1 μm |
| Measurement time* | seconds to minutes | seconds |
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