EOSAM 2022
Open Access

Table 1

Comparison of the imaging ellipsometry and the white light interference microscopy techniques.

Imaging ellipsometry White light interference microscopy
Sample preparation None None
Non-destructive Yes Yes
Scanning Yes Yes
Measurement of optical/dielectric properties Yes Yes
Topography investigation No Yes
Angle of incidence* Variable Normal incidence
Lateral imaging resolution for used experimental setups (50× objectives)* 1 μm < 1 μm
Measurement time* seconds to minutes seconds

Values are given for Nanofilm_EP4 imaging ellipsometer (Accurion) and Zygo NexView white light interference microscope.

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