| Issue |
J. Eur. Opt. Society-Rapid Publ.
Volume 21, Number 1, 2025
|
|
|---|---|---|
| Article Number | 30 | |
| Number of page(s) | 12 | |
| DOI | https://doi.org/10.1051/jeos/2025026 | |
| Published online | 27 June 2025 | |
Research Article
Knowledge based full aperture polishing
1
ASML Berlin GmbH, Waldkraiburgerstr. 5, 12489 Berlin, Germany
2
Rhine-Waal University of Applied Sciences, Faculty Technology and Bionic, Marie-Curie-Straße 1, 47533 Kleve, Germany
3
Technische Universität Berlin, Straße des 17. Juni 135, 10623 Berlin, Germany
* Corresponding author: max.schneckenburger@asml.com
Received:
1
March
2025
Accepted:
22
May
2025
Understanding and controlling of the polishing process on conventional NC (Numerical Control) machines is an important step to optimize production, reduce machine time and increase production quality. Nevertheless, due to the high number of process parameters, polishing is not understood and is almost exclusively applied empirically. The work presented in this paper shows a production-ready attachment to a lever arm polishing machine, which can be used to map the removal of material using relative speed. Calculated relative velocity and observed material removal indicate a correlation of 31.5%. This is a first step towards the complete automation of the polishing process in order to save process times, increase repeatability and avoid handling errors. It is planned to focus other polishing parameters in the future and improve the removal model.
Key words: Lever arm polishing / Spindle polishing / Automated manufacturing / Model based polishing
© The Author(s), published by EDP Sciences, 2025
This is an Open Access article distributed under the terms of the Creative Commons Attribution License (https://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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