J. Eur. Opt. Soc.-Rapid Publ.
Volume 17, Number 1, 2021
EOS Annual Meeting (EOSAM) 2020
|Number of page(s)||13|
|Published online||24 March 2021|
Nano-imprinted subwavelength gratings as polarizing beamsplitters
Department Technical Optics, Institute for Micro- and Nanotechnologies, Technische Universität Ilmenau, 98693, Ilmenau, Germany
2 siOPTICA GmbH, Moritz-von-Rohr-Straße 1a, 07745, Jena, Germany
Accepted: 28 February 2021
Polarizing beamsplitters have numerous applications in optical systems, such as systems for freeform surface metrology. They are classically manufactured from birefringent materials or with stacks of dielectric coatings. We present a binary subwavelength-structured form-birefringent diffraction grating, which acts as a polarizing beamsplitter for a wide range of incidence angles −30∘…+30∘. We refine the general design method for such hybrid gratings. We furthermore demonstrate the manufacturing steps with Soft-UV-Nanoimprint-Lithography, as well as the experimental verification, that the structure reliably acts as a polarizing beamsplitter. The experimental results show a contrast in efficiency for TE- and TM-polarization of up to 1:18 in the first order, and 34:1 in the zeroth order. The grating potentially enables us to realize integrated compact optical measurement systems, such as common-path interferometers.
Key words: Subwavelength-structures / Polarizing diffraction grating / Nanoimprint-Lithography
© The Author(s) 2021
Open Access 2021, corrected publication 2021 This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.
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