Issue |
J. Eur. Opt. Soc.-Rapid Publ.
Volume 16, Number 1, 2020
|
|
---|---|---|
Article Number | 7 | |
Number of page(s) | 11 | |
DOI | https://doi.org/10.1186/s41476-020-00129-4 | |
Published online | 08 April 2020 |
Research
Design and performance analysis of integrated focusing grating couplers for the transverse-magnetic TM00 mode in a photonic BiCMOS technology
1
Technische Universität Berlin, Office HFT 4, Einsteinufer 25, 10587, Berlin, Germany
2
IHP – Solutions GmbH, Im Technologiepark 25, 15236, Frankfurt (Oder), Germany
3
IHP – Leibnitz Institut für innovative Mikroelektronik, Im Technologiepark 25, 15236, Frankfurt (Oder), Germany
a
galina.georgieva@tu-berlin.de
Received:
4
November
2019
Accepted:
22
January
2020
Focusing grating couplers for the excitation of the fundamental transverse-magnetic (TM) mode in integrated silicon photonic waveguides are designed and characterized under the boundary conditions of a photonic BiCMOS foundry. Two types of waveguide geometries are considered – a nanowire and a rib waveguide. Wafer-scale experimental results for nanowire TM grating couplers are in excellent agreement with numerical investigations and demonstrate a robust behavior on the wafer. The mean coupling loss and the 3σ interval are -3.9 ± 0.3 dB. The on wafer variation is three times lower than for the fundamental transverse-electric (TE) polarization. Similarly, the coupling in rib waveguides is examined as well. The results indicate that the rib waveguides require a modified geometry when designed for TM. In general, the nanowire waveguide type is more suitable for TM coupling, showing a stable and repeatable performance.
Key words: Photonic integration / Integrated waveguides / Silicon nanowire / Silicon rib waveguide / Transverse-magnetic mode / Focusing grating coupler / Integrated grating coupler / Photonic BiCMOS
© The Author(s) 2020
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