Issue |
J. Eur. Opt. Soc.-Rapid Publ.
Volume 16, Number 1, 2020
|
|
---|---|---|
Article Number | 2 | |
Number of page(s) | 15 | |
DOI | https://doi.org/10.1186/s41476-019-0124-1 | |
Published online | 08 January 2020 |
Research
Round robin comparison study on the form measurement of optical freeform surfaces
1
Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116, Braunschweig, Germany
2
Physikalisch-Technische Bundesanstalt (PTB), Abbestrasse 2-12, 10587, Berlin, Germany
3
Regional Centre for Special Optics and Optoelectronic Systems (TOPTEC) Institute of Plasma Physics of the Czech Academy of Sciences, Za Slovankou 1782/3, 182 00, Praha 8, Czech Republic
4
Mahr GmbH, Carl-Zeiss-Promenade 10, 07745, Jena, Germany
5
Institut für Technische Optik, Universtiät Stuttgart, Pfaffenwaldring 9, 70569, Stuttgart, Germany
6
National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ), Tsukuba, 305-8563, Ibaraki, Japan
Received:
17
July
2019
Accepted:
13
December
2019
A round robin comparison of freeform form measurements was carried out by the project partners and stakeholders of a European metrology research project. Altogether six measuring instruments were considered: five different (pointwise and areal) optical devices and one tactile device. Three optical freeform surfaces were used for the comparison measurements, where two specimens were measured by five instruments and one specimen by four instruments. In this paper, the evaluation methods and results of this round robin are presented for the three freeform surfaces made from a temperature-stable material, Super Invar ®. The freeforms had diameters of 40 mm, 50 mm and 100 mm and best-fit radii of 39.75 mm (convex), 40.9 mm (convex) and 423.5 mm (concave). For comparison, the bilateral pointwise differences between the available measurements were calculated. The root-mean-square values of these differences ranged from 15 nm to 110 nm (neglecting spherical contributions) and provided an insight into the status of typical freeform measurement capabilities for optical surfaces.
Key words: Freeform optical surfaces / Metrology / Interlaboratory comparison
© The Author(s) 2019
Open Access This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.