J. Eur. Opt. Soc.-Rapid Publ.
Volume 15, Number 1, 2019
Highlights of EOSAM 2018
|Number of page(s)||9|
|Published online||11 April 2019|
Spectral composition of low-coherence interferograms at high numerical apertures
Department Electrical Engineering and Computer Science, University of Kassel, Measurement Technology Group, 34109, Kassel, Germany
Accepted: 29 March 2019
Interference signals in coherence scanning interferometry at high numerical apertures and narrow bandwidth illumination are spectrally broadened. This enables phase analysis within a spectral range much wider than the spectral distribution of the light emitted by the light source. Consequently, different surface features can be resolved depending on the wavelength used for phase analysis of the interference signals.
In addition, the surface topography itself affects the spectral composition of interference signals in different ways. Signals related to tilted surfaces or step height structures show special spectral characteristics. Thus, spectral amplitude and phase analysis enables a better understanding of the underlying physical mechanisms and gives hints how to improve the measurement accuracy.
Key words: Coherence scanning interferometry / Numerical aperture / Interference microscopy / Spectral analysis / Lateral resolution
© The Author(s) 2019
Open Access This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.
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