| Issue |
J. Eur. Opt. Soc.-Rapid Publ.
Volume 13, Number 1, 2017
|
|
|---|---|---|
| Article Number | 2 | |
| Number of page(s) | 6 | |
| DOI | https://doi.org/10.1186/s41476-016-0032-6 | |
| Published online | 19 January 2017 | |
Research
Absolute surface metrology by shear rotation with position error correction
1
Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, 150001, Harbin, China
2
Department of Engineering Science, University of Oxford, Parks Road, OX1 3PJ, Oxford, UK
Received:
29
September
2016
Accepted:
20
December
2016
Background: Absolute test is one of the most important and efficient techniques to saperate the reference surface which usually limits the accuracy of test results.
Method: For the position error correction in absolute interferometry tests based on rotational and translational shears, the estimation algorithm adopts least-squares technique to eliminate azimuthal errors caused by rotation inaccuracy and the errors of angular orders are compensated with the help of Zernike polynomials fitting by an additional rotation measurement with a suitable selection of rotation angles.
Results: Experimental results show that the corrected results with azimuthal errors are very close to those with no errors, compared to the results before correction.
Conclusions: It can be seen clearly that the testing errors caused by rotation inaccuracy and alignment errors of the measurements can be consequently eliminated from the differences in measurement results by the proposed method.
Key words: Absolute test / Shear rotation / Error correction / Zernike polynomials
© The Author(s) 2017
Open Access This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.
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