| Issue |
J. Eur. Opt. Soc.-Rapid Publ.
Volume 6, 2011
|
|
|---|---|---|
| Article Number | 11013s | |
| Number of page(s) | 5 | |
| DOI | https://doi.org/10.2971/jeos.2011.11013s | |
| Published online | 18 April 2011 | |
Regular papers
Diffractive shaping of excimer-laser beams for pulsed laser deposition
1
Department of Applied Physics, Aalto University, P.O.Box 15100, FI-00076 Aalto, Finland
2
VTT Fusion and Plasma Technology, P. O. Box 1000, FI-02044 VTT, Finland
Received:
3
May
2010
We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 2 × 2 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.
Key words: Flat-top profile / top-hat profile / beam-splitter grating / partial coherence
© The Author(s) 2011. All rights reserved.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.