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Cited article:

3D-measurement with the stereo scanning electron microscope on sub-micrometer structures

T. Vynnyk, T. Schultheis, T. Fahlbusch, E. Reithmeier

J. Eur. Opt. Soc.-Rapid Publ., 5 (2010) 10038s

Published online: 2010-09-01

DOI: https://doi.org/10.2971/jeos.2010.10038s

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