| Issue |
J. Eur. Opt. Soc.-Rapid Publ.
Volume 5, 2010
|
|
|---|---|---|
| Article Number | 10038s | |
| Number of page(s) | 8 | |
| DOI | https://doi.org/10.2971/jeos.2010.10038s | |
| Published online | 01 September 2010 | |
Regular papers
3D-measurement with the stereo scanning electron microscope on sub-micrometer structures
Institute of Measurement and Automatic Control, University Hannover, Nienburgerstr. 17 30167, Hannover
* taras.vynnyk@imr.uni-hannover.de
Received:
29
January
2010
In this paper the photometric or the so called “shape from shading” method is presented. In comparison to existing methods the efficiency of the detector system was considered and the requirements of the cosine Lambert’s law for the angle distribution of the emitted electrons are suppressed. This new method was experimentally verified by measuring a steel sphere, a holographic grating and a hologram.
Key words: stereo electron microscope (SEM) / 3D-surface reconstruction / shape from shading / holographic diffraction grating / hologram
© The Author(s) 2010. All rights reserved.
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