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All issues Volume 7 (2012) J. Eur. Opt. Soc.-Rapid Publ., 7 (2012) 12043 References
Open Access
Issue
J. Eur. Opt. Soc.-Rapid Publ.
Volume 7, 2012
Article Number 12043
Number of page(s) 8
DOI https://doi.org/10.2971/jeos.2012.12043
Published online 31 October 2012
  1. R. F. Pease, and S. Y. Chou, “Lithography and other patterning techniques for future electronics,” Proc. IEEE 96, 248–270 (2008). [CrossRef] [Google Scholar]
  2. D. P. Sanders, “Advances in patterning materials for 193 nm immersion lithography,” Chem. Rev. 110, 321–360 (2010). [CrossRef] [Google Scholar]
  3. C. Wagner, and N. Harned, “EUV lithography: Lithography gets extreme,” Nat.Photon. 4, 24–26 (2010). [Google Scholar]
  4. S. D. Gittard, and R. J. Narayan, “Laser direct writing of micro- and nano-scale medical devices,” Expert Rev. Med. Devic. 7(3), 343–356 (2010). [CrossRef] [Google Scholar]
  5. A. Ovsianikov, A. Ostendorf, and B. N. Chichkov, “Three-dimensional photofabrication with femtosecond lasers for applications in photonics and biomedicine,” Appl. Surf. Sci. 253, 6599–6602 (2007). [NASA ADS] [CrossRef] [Google Scholar]
  6. A. Ovsianikov, M. Malinauskas, S. Schlie, B. Chichkov, S. Gittard, R. Narayan, M. Löbler, K. Sternberg, K. P. Schmitz, and A. Haverich, “Three-dimensional laser micro- and nano-structuring of acrylated poly(ethylene glycol) materials and evaluation of their cytoxicity for tissue engineering applications,” Acta Biomater. 7(3), 947–974 (2011). [Google Scholar]
  7. D. Radtke, and U. D. Zeitner, “Laser-lithography on non-planar surfaces,” Opt. Express 15(3), 1167–1174 (2007). [CrossRef] [Google Scholar]
  8. G. Subramania, Y. J. Lee, A. J. Fischer, and D. D. Koleske, “Log-Pile TiO2 Photonic Crystal for Light Control at Near-UV and Visible Wavelengths,” Adv. Mater. 22, 487–491 (2010). [NASA ADS] [CrossRef] [Google Scholar]
  9. J. K. Gansel, M. Thiel, M. S. Rill, M. Decker, K. Bade, V. Saile, G. von Freymann, S. Linden, and M. Wegener, “Gold helix photonic metamaterial as broadband circular polarizer,” Science 325, 1513–1515 (2009). [NASA ADS] [CrossRef] [Google Scholar]
  10. M. S. Rill, C. Plet M. Thiel, I. Staude, G. Von Freymann, S. Linden, and M. Wegener, “Photonic metamaterials by direct laser writing and silver chemical vapour deposition,” Nat. Mater. 7, 543–546 (2008). [NASA ADS] [CrossRef] [Google Scholar]
  11. C. W. J. Berendsen, M. Škereň, D. Najdek, and F. Černý, “Superhydrophobic surface structures in thermoplastic polymers by interference lithography and thermal imprinting,” App. Surf. Sci. 255(23), 9305–9310 (2009). [NASA ADS] [CrossRef] [Google Scholar]
  12. M. Altissimo, “E-beam lithography for micro/nanofabrication,” Biomicrofluidics 4, 3–6 (2010). [CrossRef] [Google Scholar]
  13. R. Menon, A. Patel, D. Gill, and H. I. Smith, “Maskless Lithography,” Mater. Today 8, 26–33 (2005). [CrossRef] [Google Scholar]
  14. M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turber, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404, 53–56 (2000). [NASA ADS] [CrossRef] [Google Scholar]
  15. W. J. Daukscher, D. Mancini, K. Nordquist, D. J. Resnick, P. Hudek, D. Beyer, T. R. Groves, and O. Fortagne, “Fabrication of Step-and-flash Imprint Lithography Templates using a Variable Shaped Beam Exposure Tool,” Microelectron. Eng. 75(4), 345–351 (2004). [CrossRef] [Google Scholar]
  16. V. Mizeikis, V. Purlys, D. Paipulas, L. Maigyte, and K. Staliunas, “Tailoring of photonic structures by femtosecond laser lithography,” Proc. SPIE 8204, 820417 (2011) [NASA ADS] [CrossRef] [Google Scholar]
  17. M. Thiel, J. Fischer, G. von Freymann, and M. Wegener, “Direct laser writing of three-dimensional submicron structures using a continuous-wave laser at 532 nm,” Appl. Phys. Lett. 97, 221102 (2010). [NASA ADS] [CrossRef] [Google Scholar]
  18. T. Wang, W. Yu, D. Zhang, C. Li, H. Zhang, W. Xu, Z. Xu, H. Liu, Q. Sun, and Z. Lu, “Lithographic fabrication of diffractive optical elements in hybrid sol-gel glass on 3-D curved surfaces,” Opt. Express 18, 25102–25107 (2010). [NASA ADS] [CrossRef] [Google Scholar]
  19. S. K. Selvaraja, P. Jaenen, W. Bogaerts, D. Van Thourhout, P. Dumon, and R. Baets, “Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193nm Optical Lithography,” J. Lightwave Technol. 0, 1–8 (2009). [Google Scholar]
  20. A. G. Poleshchuk, A. A. Kutanov, V. P. Bessmeltsev, V. P. Korolkov, R. V. Shimanskii, A. I. Malyshev, A. E. Matochkin, N. V. Goloshevskii, K. V. Makarov, and V. P. Makarov, “Microstructuring of optical surfaces: Technology and device for direct laser writing of diffractive structures,” Optoel. Instr. Data Proces. 6(2), 171–180 (2010). [Google Scholar]
  21. A. Bulanovs, E. Tamanis, and I. Mihailova, “Holographic recording device based on LCoS spatial light modulator,” Latvian Journal of Phys. and Tech. Sciences 48(5), 60–68 (2011). [NASA ADS] [CrossRef] [Google Scholar]
  22. M. Tang, Z. C. Chen, Z. Q. Huang, Y. S. Choo, and M. H. Hong, “Maskless multiple-beam laser lithography for large area nanostructure/microstructure fabrication,” Appl. Opt. 50(35), 6536–6542 (2011). [NASA ADS] [CrossRef] [Google Scholar]
  23. K. Obata, J. Koch, U. Hinze, and B. N. Chichkov, “Multi-focus two-photon polymerization technique based on individually controlled phase modulation,” Opt. Express 18(16), 17193–17200 (2010). [NASA ADS] [CrossRef] [Google Scholar]
  24. S. D. Gittard, A. Nguyen, K. Obata, A. Koroleva, R. J. Narayan, and B. N. Chichkov, “Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator,” Biomed. Opt. Express 2(11), 3167–3178 (2011). [CrossRef] [Google Scholar]
  25. T. Sandstrom, P. Askebjer, J. Sallander, R. Zerne, and A. Karawajczyk, “Pattern generation with SLM imaging,” Proc. SPIE 4562, 38–44, (2002). [NASA ADS] [CrossRef] [Google Scholar]
  26. L. H. Erdmann, A. Deparnay, F. Wirth, and R. Brunner, “MEMS-based lithography for the fabrication of micro-optical components,” Proc. SPIE 5347, 79 (2004). [NASA ADS] [CrossRef] [Google Scholar]
  27. L. Erdmann, A. Deparnay, G. Maschke, M. Langle, and R. Brunner, “MOEMS-based lithography for the fabrication of micro-optical components,” J. Microlith. Microfab. 4, 041601 (2005). [Google Scholar]
  28. X. Zhu, Y. Xu, and S. Yang, “Distortion of 3D SU8 Photonic Structures Fabricated by Four-beam Holographic Lithography with Umbrella Configuration,” Opt. Express 15(25), 16546–16560, (2007). [NASA ADS] [CrossRef] [Google Scholar]
  29. I. Divliansky, and T. S. Mayer, “Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography,” Appl. Phys. Lett. 82(11), 1667–1669 (2003). [NASA ADS] [CrossRef] [Google Scholar]
  30. D. Pizzanelli, “The development of direct-write digital holography,” Technical review at holographer.org (2004). [Google Scholar]

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