| Issue |
J. Eur. Opt. Society-Rapid Publ.
Volume 21, Number 1, 2025
EOSAM 2024
|
|
|---|---|---|
| Article Number | 7 | |
| Number of page(s) | 20 | |
| DOI | https://doi.org/10.1051/jeos/2025002 | |
| Published online | 20 February 2025 | |
Research Article
Resolution enhancement methods in optical microscopy for dimensional optical metrology
1
Institut für Halbleitertechnik, Laboratory for Emerging Nanometrology, Technische Universität Braunschweig, Hans-Sommer-Str. 66, 38106 Braunschweig, Germany
2
Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, Germany
3
Physics Department, University of Torino, via P. Giuria 1, 10125 Torino, Italy
4
Istituto Nazionale di Ricerca Metrologica, Strada delle Cacce 91, 10135 Torino, Italy
5
Swansea University, Singleton Park, Swansea SA28PP, Wales, UK
6
Institute of Technical Physics and Materials Science, Konkoly Thege Str. 29-33, Budapest, 1121, Hungary
7
Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Strasse 15, Jena, 07745, Germany
8
DFM, Danish National Metrology Institute, Kogle Allé 5, 2970 Hørsholm, Denmark
9
Czech Metrology Institute, Okružní 31, 638 00 Brno, Czech Republic
10
National Institute of Nuclear Physics (INFN), Torino Section, via Pietro Giuria, 10125 Torino, Italy
11
Department of Electrical Engineering, Institute of Physics, Faculty of Science and Technology, University of Debrecen, Bem ter 18, Debrecen, 4026, Hungary
* Corresponding author: bernd.bodermann@ptb.de
Received:
30
August
2024
Accepted:
7
January
2025
In this paper, we discuss several enhancement approaches to increase the resolution and sensitivity of optical microscopy as a tool for dimensional nanometrology. Firstly, we discuss a newly developed through-focus microscopy technique providing additional phase information from the afocal images to increase the nanoscale sensitivity of classical microscopy. We also explore different routes to label-free or semiconductor compatible labelling super-resolution microscopy suitable for a broad range of technical applications. We present initial results from, a new wide-field super-resolution imaging technique enabled by Raman scattering. In addition, we discuss super-resolution imaging using NV centres in nano-diamonds as labels and their application in future reference standards.
Key words: Nitrogen-vacancy (NV) centres / STED microscopy / Photoluminescence / Label-free super-resolution / Optical nanometrology / Through-focus microscopy / Non-linear Raman super-resolution
© The Author(s), published by EDP Sciences, 2025
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