| Issue |
J. Eur. Opt. Soc.-Rapid Publ.
Volume 7, 2012
|
|
|---|---|---|
| Article Number | 12049 | |
| Number of page(s) | 4 | |
| DOI | https://doi.org/10.2971/jeos.2012.12049 | |
| Published online | 02 December 2012 | |
Regular papers
Improving the polishing accuracy by determining the variance of the friction coefficient
1
HTW Aalen, Beethovenstr. 1, 73430 Aalen, Germany
2
TU Ilmenau, Postfach 100565, 98684 Ilmenau, Germany
z
Received:
26
July
2012
Revised:
26
September
2012
The variation of the friction coefficient in the polishing process is investigated comparing the results of a numerical simulation with polishing experiments. To improve the accuracy of the predicted wear in the simulation a method is presented to measure the friction coefficient in relation to the relative velocity using an offset tool.
Key words: Polishing / CCP / simulation / Preston coefficient / friction coefficient
© The Author(s) 2012. All rights reserved.
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