| Issue |
J. Eur. Opt. Soc.-Rapid Publ.
Volume 5, 2010
|
|
|---|---|---|
| Article Number | 10035s | |
| Number of page(s) | 6 | |
| DOI | https://doi.org/10.2971/jeos.2010.10035s | |
| Published online | 01 September 2010 | |
Regular papers
High resolution displacement detection by speckle pattern analysis : accuracy limits in linear displacement speckle metrology
1
Max-Planck-Institut f ür Dynamik und Selbstorganisation, Bunsenstraße 10, 37073 Göttingen, Germany
2
Ecole Polytechnique Fédérale de Lausanne, EPFL - IMT - OPT, Rue A.-L. Breguet 2, 2000 Neuchâtel, Switzerland
Received:
25
November
2009
We propose a simple reflection measurement setup and a motion evaluation procedure based on a two dimensional recording of subsequent speckle images. The averaging of cross correlation functions is used to measure displacements. We demonstrate experimentally a 10 nm precision on a 50 µm measurement range limited by systematical errors. An image library is proposed to extend the measurement range. Limitations are given and documented improvements predicted an accuracy better than 5 nm over a range of 150 µm.
Key words: inear displacement / speckles / non-contact measurements / laser measurements / optical sensing and sensors
© The Author(s) 2010. All rights reserved.
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