Regular papers

Toward the reflectance measurement of micro components

¹ CEA, DAM, Le Ripault, F-37260 Monts, France
² QOL, 13 Avenue Louise Michel. 28500 Vernouillet, France
³ Institut de Recherches R. Bosch, 1027 Lonay, Suisse, France
⁴ Institut Fresnel, Unité Mixte de Recherche 6133, Université Paul Cezanne, 13397 Marseille Cedex 20, France

^* herve.piombini@cea.fr

Received: 26 November 2009

Abstract

Today, the controls by reflection of optical coatings are most of the time made with flat samples thanks to commercial spectrophotometers. However, components become smaller and more complex, curvature radius of lenses or mirrors are larger, so that measures are not so accurate and sometimes are not possible. Flat samples don’t represent anymore the real reflection ability of the component. So to perform this kind of measurements, special devices are needed. A new means developed by the French Atomic Energy Commission (CEA) is proposed to fill in this gap. This device has a accuracy of 0.06% on flat sample over the 400 nm to 950 nm wavelength range with a spot size of 100 µm. It can measure the reflectance of samples even if their shapes are spherical. We investigate stainless steel balls and optical micro components (mirrors and lens) thanks to the tiny size of the analyzing spot of our reflectometer. Herein we introduce our first results on small optical components and show the limiting factors of our device.