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Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry

P. Petrik, N. Kumar, M. Fried, B. Fodor, G. Juhasz, S. F. Pereira, S. Burger and H. P. Urbach

J. Eur. Opt. Soc.-Rapid Publ., 10 (2015) 15002

Published online: 29 January 2015

DOI: 10.2971/jeos.2015.15002

P. Petrik

N. Kumar

M. Fried

B. Fodor

G. Juhasz

S. F. Pereira

S. Burger

H. P. Urbach

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)

Editor-in-Chief: Silvia Soria Huguet - Editorial board
eISSN: 1990-2573