Journal of the European Optical Society-Rapid Publications

Direct machining of curved trenches in silicon with femtosecond accelerating beams

A. Mathis, L. Froehly, L. Furfaro, M. Jacquot, J. M. Dudley and F. Courvoisier

J. Eur. Opt. Soc.-Rapid Publ., 8 (2013) 13019

Published online: 10 March 2013

DOI: 10.2971/jeos.2013.13019

A. Mathis

L. Froehly

L. Furfaro

M. Jacquot

J. M. Dudley

F. Courvoisier

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