Journal of the European Optical Society-Rapid Publications

3D-measurement with the stereo scanning electron microscope on sub-micrometer structures

T. Vynnyk, T. Schultheis, T. Fahlbusch and E. Reithmeier

J. Eur. Opt. Soc.-Rapid Publ., 5 (2010) 10038s

Published online: 01 September 2010

DOI: 10.2971/jeos.2010.10038s

T. Vynnyk

T. Schultheis

T. Fahlbusch

E. Reithmeier

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