Journal of the European Optical Society-Rapid Publications

Investigations on a robust profile model for the reconstruction of 2D periodic absorber lines in scatterometry

H. Gross, J. Richter, A. Rathsfeld and M. Bär

J. Eur. Opt. Soc.-Rapid Publ., 5 (2010) 10053

Published online: 23 September 2010

DOI: 10.2971/jeos.2010.10053

H. Gross

J. Richter

A. Rathsfeld

M. Bär

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