Journal of the European Optical Society-Rapid Publications

Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanning

N. Kumar, O. El Gawhary, S. Roy, S. F. Pereira and H. P. Urbach

J. Eur. Opt. Soc.-Rapid Publ., 8 (2013) 13048

Published online: 17 July 2013

DOI: 10.2971/jeos.2013.13048

N. Kumar

O. El Gawhary

S. Roy

S. F. Pereira

H. P. Urbach

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