Journal of the European Optical Society-Rapid Publications

Scanning effects in coherent fourier scatterometry

S. Roy, O. El Gawhary, N. Kumar, S. F. Pereira and H. P. Urbach

J. Eur. Opt. Soc.-Rapid Publ., 7 (2012) 12031

Published online: 25 July 2012

DOI: 10.2971/jeos.2012.12031

S. Roy

O. El Gawhary

N. Kumar

S. F. Pereira

H. P. Urbach

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