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An integrated exposure and measurement tool for 5-DOF direct laser writing based on chromatic differential confocal sensing

Johannes Belkner, Johannes Leineweber, Georg Hein, Jaqueline Stauffenberg, Alexander Barth, Thomas Kissinger, Eberhard Manske and Thomas Fröhlich

J. Eur. Opt. Society-Rapid Publ., 21 1 (2025) 27

Published online: 27 June 2025

DOI: 10.1051/jeos/2025017

Johannes Belkner

Johannes Leineweber

Georg Hein

Jaqueline Stauffenberg

Alexander Barth

Thomas Kissinger

Eberhard Manske

Thomas Fröhlich

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)

Editor-in-Chief: Silvia Soria Huguet - Editorial board
eISSN: 1990-2573