Evaluation of surface topography and microstructure of electroplated copper ultraprecision-machined with a single-crystal diamond toolHideo Takino, Hidenori Aizawa and Masahiko KanaokaJ. Eur. Opt. Society-Rapid Publ., 22 1 (2026) 29DOI: https://doi.org/10.1051/jeos/2026030
