Flexible calibration and alignment tool for scanning beam interference lithography systems based on aerial imagingKevin Treptow, Josias Rühle, Christof Pruß, Ingo Ortlepp, Tobias Haist, Oliver Sawodny, Eberhard Manske, Thomas Kissinger and Stephan ReicheltJ. Eur. Opt. Society-Rapid Publ., 22 1 (2026) 36DOI: https://doi.org/10.1051/jeos/2026028
