2-dimensional in-plane displacement measurement system at fast sampling rate of 5 kHz using sinusoidal phase modulation interferometerMasato Higuchi, Taku Sato and Masato AketagawaJ. Eur. Opt. Society-Rapid Publ., 21 2 (2025) 32DOI: https://doi.org/10.1051/jeos/2025028