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Cited article:

Deterministic measurement and correction of the pad shape in full-aperture polishing processes

D. Liao, Q. Zhang, R. Xie, X. Chen, S. Zhao, J. Wang

J. Eur. Opt. Soc.-Rapid Publ., 10 (2015) 15049

Published online: 2015-11-07

DOI: https://doi.org/10.2971/jeos.2015.15049

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