Articles citing this article

The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry

P. Petrik, N. Kumar, M. Fried, B. Fodor, G. Juhasz, S. F. Pereira, S. Burger, H. P. Urbach

J. Eur. Opt. Soc.-Rapid Publ., 10 (2015) 15002

Published online: 2015-01-29

DOI: https://doi.org/10.2971/jeos.2015.15002

This article has been cited by the following article(s):

Modeling of dimensions and sensing properties of gold gratings by spectroscopic ellipsometry and finite element method

Deshabrato Mukherjee, Sven Burger, Thomas Siefke, Jeetendra Gour, Bernd Bodermann, Peter Petrik, L. De Stefano, R. Velotta and E. Descrovi
EPJ Web of Conferences 309 02016 (2024)
https://doi.org/10.1051/epjconf/202430902016

Optical singularity assisted method for accurate parameter detection of step-shaped nanostructure in coherent Fourier scatterometry

Xiujie Dou, Changjun Min, Yuquan Zhang, S. F. Pereira and Xiaocong Yuan
Optics Express 30 (16) 29287 (2022)
https://doi.org/10.1364/OE.462045

Mapping and Imaging of Thin Films on Large Surfaces

Peter Petrik and Miklos Fried
physica status solidi (a) 219 (13) (2022)
https://doi.org/10.1002/pssa.202100800

Novel optical metrology for inspection of nanostructures fabricated by substrate conformal imprint lithography

Teun D G Nevels, Lieke J M Ruijs, Paul van de Meugheuvel, et al.
Journal of Optics 24 (9) 094002 (2022)
https://doi.org/10.1088/2040-8986/ac7abe

Model-based characterisation of complex periodic nanostructures by white-light Mueller-matrix Fourier scatterometry

Maria Laura Gödecke, Karsten Frenner and Wolfgang Osten
Light: Advanced Manufacturing 2 (2) 1 (2021)
https://doi.org/10.37188/lam.2021.018

Metrology of Nanostructures by Tomographic Mueller-Matrix Scatterometry

Chao Chen, Xiuguo Chen, Yating Shi, Honggang Gu, Hao Jiang and Shiyuan Liu
Applied Sciences 8 (12) 2583 (2018)
https://doi.org/10.3390/app8122583

Spectroscopic Ellipsometry for Photovoltaics

Peter Petrik
Springer Series in Optical Sciences, Spectroscopic Ellipsometry for Photovoltaics 212 509 (2018)
https://doi.org/10.1007/978-3-319-75377-5_17

Jason P. Cain, Martha I. Sanchez, Sven Burger, Lin Zschiedrich, Jan Pomplun, Sven Herrmann and Frank Schmidt
9424 94240Z (2015)
https://doi.org/10.1117/12.2085795

Christophe Gorecki, Anand K. Asundi, Wolfgang Osten, J. Endres, N. Kumar, P. Petrik, M. -. Henn, S. Heidenreich, S. F. Pereira, H. P. Urbach and B. Bodermann
9132 913208 (2014)
https://doi.org/10.1117/12.2052819

Christophe Gorecki, Anand K. Asundi, Wolfgang Osten, Bernd Bodermann, Bernd Loechel, Frank Scholze, Gaoliang Dai, Jan Wernecke, Johannes Endres, Juergen Probst, Max Schoengen, Michael Krumrey, Poul-Erik Hansen and Victor Soltwisch
9132 91320A (2014)
https://doi.org/10.1117/12.2052278