Articles citing this article

The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Research progress in chemical mechanical polishing (CMP) of silicon wafers for integrated circuits

Zuozuo Wu, Zhonghua Zhu, Yiting Li, Daming Wang, Yangjian Li, Shuai Yuan, Jianwei Cao and Deren Yang
The International Journal of Advanced Manufacturing Technology 143 (9-10) 4655 (2026)
https://doi.org/10.1007/s00170-026-17714-5

In-situ monitoring and regulation of surface shape in swing fixed abrasive lapping of BK7 glass

Ning Liu, Jingyi Jia, Chao Tang, Pengfei Wu, Jun Li, Jianbin Wang and Yongwei Zhu
Precision Engineering 99 122 (2026)
https://doi.org/10.1016/j.precisioneng.2026.01.003

Prediction of Process Parameters for Ultra-Precision Optical Processing Based on Dual-Stacked LSTM

Pengzhi Ang, Minghong Yang, Jun Chen, Jun Cao and Qiuyu Zhu
Photonics 10 (3) 278 (2023)
https://doi.org/10.3390/photonics10030278

Measurement of Contact Pressure Distribution Map at Workpiece/tin Lap Interface and Process Parameters Optimization During Full-Aperture Polishing With Tin Lap

Lele Ren, Feihu Zhang, Defeng Liao, Shijie Zhao, Ruiqing Xie, Jian Wang and Qiao Xu
ECS Journal of Solid State Science and Technology 9 (4) 044011 (2020)
https://doi.org/10.1149/2162-8777/ab902d

Defeng Liao, Ruiqing Xie, Shijie Zhao, Lele Ren, Yiren Wang, William T. Plummer, Bin Fan, Xiong Li, Xiangang Luo, Mingbo Pu and Yongjian Wan
121 (2019)
https://doi.org/10.1117/12.2505902

Surface shape development of the pitch lap under the loading of the conditioner in continuous polishing process

Defeng Liao, Ruiqing Xie, Shijie Zhao, Lele Ren, Feihu Zhang, Jian Wang and Qiao Xu
Journal of the American Ceramic Society 102 (6) 3129 (2019)
https://doi.org/10.1111/jace.16178

Kinematic model for material removal distribution and surface figure in full-aperture polishing

Defeng Liao, Lele Ren, Feihu Zhang, Jian Wang and Qiao Xu
Applied Optics 57 (4) 588 (2018)
https://doi.org/10.1364/AO.57.000588

Improvement of the surface shape error of the pitch lap to a deterministic continuous polishing process

Defeng Liao, Ruiqing Xie, Rongkang Sun, Shijie Zhao, Lele Ren, Feihu Zhang, Jian Wang and Qiao Xu
Journal of Manufacturing Processes 36 565 (2018)
https://doi.org/10.1016/j.jmapro.2018.10.040