EDP Sciences logo
Submit your research paper
Search
Menu
All issues Volume 21 / No 2 (2025) J. Eur. Opt. Society-Rapid Publ., 21 2 (2025) 50 References
Open Access
Issue
J. Eur. Opt. Society-Rapid Publ.
Volume 21, Number 2, 2025
Article Number 50
Number of page(s) 12
DOI https://doi.org/10.1051/jeos/2025047
Published online 19 December 2025
  1. Naulleau PP, Cho CH, Gullikson EM, Bokor J, Transmission phase gratings for EUV interferometry, J. Synchrotron Radiat. 7, 405–410 (2000). https://doi.org/10.1107/S0909049500010670. [Google Scholar]
  2. Li R et al., Broadband imaging spectrometer based on conical diffraction for extreme ultraviolet source, Opt. Express 33, 8726–8737 (2025). https://doi.org/10.1364/OE.549508 [Google Scholar]
  3. Choueikani F et al., High-efficiency B₄C/Mo₂C alternate multilayer grating for monochromators in the photon energy range from 0.7 to 34 keV, Opt. Lett. 39, 2141 (2014). https://doi.org/10.1364/OL.39.002141 [Google Scholar]
  4. Voronov DL et al., High-efficiency diffraction grating for EUV lithography beamline monochromator, Adv. X-Ray/EUV Optics Components XI, Proc. SPIE 9963, 996306 (2016). https://doi.org/10.1117/12.2238303 [Google Scholar]
  5. Young PR, Future Prospects for Solar EUV and Soft X-Ray Spectroscopy Missions, Front. Astron. Space Sci. 8, 662790 (2021). https://doi.org/10.3389/fspas.2021.662790. [Google Scholar]
  6. Seely JF et al., Calibration of an extreme-ultraviolet transmission grating spectrometer with synchrotron radiation, Appl. Opt. 40, 1623–1630 (2001). https://doi.org/10.1364/AO.40.001623. [Google Scholar]
  7. Wu S et al., Effect of sidewall roughness on the diffraction efficiency of EUV high-aspect-ratio freestanding transmission gratings, Opt. Express 30, 40413–40424 (2022). https://doi.org/10.1364/OE.473602. [Google Scholar]
  8. Seely JF, Multilayer grating for the extreme ultraviolet spectrometer (EIS), X-Ray Optics, Inst. Missions IV, Proc. SPIE, 174 (2000). https://doi.org/10.1117/12.407557. [Google Scholar]
  9. Braig C et al., An EUV beamsplitter based on conical grazing-incidence diffraction, Opt. Express 20, 1825–1838 (2012). https://doi.org/10.1364/OE.20.001825. [Google Scholar]
  10. Fabris N, Miotti P, Frassetto F, and Poletto L A high-resolution XUV grating monochromator for the spectral selection of ultrashort harmonic pulses, Appl. Sci. 9, 2502 (2019). https://doi.org/10.3390/app9122502. [Google Scholar]
  11. Voronov DL et al., A 10,000 groove/mm multilayer-coated grating for EUV spectroscopy, Opt. Express 19, 6320 (2011). https://doi.org/10.1364/OE.19.006320. [Google Scholar]
  12. Goray L, Seely JF, Wavelength separation of plus and minus orders of soft-X-ray–EUV multilayer-coated gratings at near-normal incidence, Proc. SPIE. 5900, 59000C (2005). https://doi.org/10.1117/12.614565 [Google Scholar]
  13. Mahmoud AHK et al., Al/Mo/SiC multilayer diffraction gratings with broadband efficiency in the extreme ultraviolet, Opt. Express 30, 38319–38338 (2022). https://doi.org/10.1364/OE.468568. [Google Scholar]
  14. Mahmoud AHK et al., Experimental study and modeling of EUV 4000 lines/mm diffraction gratings coated with periodic and aperiodic Al/Mo/SiC multilayers, Appl. Opt. 63, 30–41 (2024). https://doi.org/10.1364/AO.505546. [Google Scholar]
  15. Mahmoud A et al., Development of multilayer gratings for Solar-C EUV spectro-imager, Proc. SPIE 12576, 40–45 (2023). https://doi.org/10.1117/12.2665459. [Google Scholar]
  16. Li J, et al., Highly efficient and aberration-free off-plane grating spectrometer and monochromator for EUV–soft X-ray applications, Light Sci. Appl. 13, 1–12 (2024). https://doi.org/10.1038/s41377-023-01342-9. [Google Scholar]
  17. Pascolini M, Bonora S, Giglia A, Mahne N, Nannarone S, Poletto L, Gratings in a conical diffraction mounting for an EUV time-delay-compensated monochromator, Appl. Opt. 45, 3253–3262 (2006). https://doi.org/10.1364/AO.45.003253. [Google Scholar]
  18. Mahmoud AHK, Multilayer diffraction gratings with broadband efficiency in the extreme ultraviolet, Ph.D. thesis, Université Paris-Saclay, 2023. https://hal.science/tel-04545710/. [Google Scholar]
  19. Kleineberg U et al., Photoemission microscopy with microspot-XPS using undulator radiation and a high-throughput multilayer monochromator at BESSY, J. Electron Spectrosc. Relat. Phenom. 101–103, 931–936 (1999). https://doi.org/10.1016/S0368-2048(98)00374-0. [Google Scholar]
  20. Liu Y et al., SiC/W/Ir multilayer-coated grating for enhanced efficiency in 50–100 nm wavelength range in Seya–Namioka mount, Opt. Lett. 36, 163–165 (2011). https://doi.org/10.1364/OL.36.000163. [Google Scholar]
  21. Seely JF, Brown CM, Multilayer-coated grating spectrometer operating in the EUV region and based on the Seya–Namioka mount, Appl. Opt. 32, 6288–6293 (1993). https://doi.org/10.1364/AO.32.006288. [Google Scholar]
  22. Delmotte F et al., X-ray–ultraviolet beam splitters for the Michelson interferometer, Appl. Opt. 41, 5905–5912 (2002). https://doi.org/10.1364/AO.41.005905. [Google Scholar]
  23. Caretta A, Brondin CA, Polarizing beam splitter for vacuum ultraviolet to X-ray radiation, Rev. Sci. Instrum. 95, 073105 (2024). https://doi.org/10.1063/5.0215241/3304407. [Google Scholar]
  24. Windt DL, IMD – Software for modeling the optical properties of multilayer films, Comput. Phys. 12, 360 (1998). https://doi.org/10.1063/1.168689. [Google Scholar]
  25. Hugonin JP, Lalanne P, RETICOLO software for grating analysis. arXiv:2101.00901v4 [physics.optics], Jan. 2025. https://doi.org/10.48550/arXiv.2101.00901. [Google Scholar]
  26. Meltchakov E et al., Development of Al-based multilayer optics for EUV, Appl. Phys. A 98, 111–117 (2010). https://doi.org/10.1007/s00339-009-5445-2. [Google Scholar]
  27. Pflüger M, Soltwisch V, Probst J, Scholze F, Krumrey M, Grazing-Incidence Small-Angle X-ray Scattering (GISAXS) on small periodic targets using large beams, IUCrJ 4, 431–438 (2017). https://doi.org/10.1107/S2052252517006297. [Google Scholar]
  28. Spiller E, Interference in thin films: Theory, Opt. Sci. PM15, 101–139 (1994). https://doi.org/10.1117/3.176482.CH7. [Google Scholar]
  29. Schindelin J et al., Fiji: An open-source platform for biological-image analysis, Nat. Methods 9, 676–682 (2012). https://doi.org/10.1038/nmeth.2019. [CrossRef] [Google Scholar]
  30. Suh HS et al., Characterization of the shape and line-edge roughness of polymer gratings with grazing-incidence small-angle X-ray scattering and atomic-force microscopy, J. Appl. Cryst. 49, 823–834 (2016). https://doi.org/10.1107/S1600576716004453. [Google Scholar]
  31. Shvyd’ko Y, X-Ray Optics: High Energy Resolution Applications, Springer Series in Optical Sciences, Ch. 2, Vol. 98 (Springer, 2004), pp. 80–83. https://doi.org/10.1007/978-3-540-40890-1. [Google Scholar]
  32. Burcklen C, Delmotte F, Alameda J, Salmassi F, Gullikson E, Soufli R, Optical constants of magnetron-sputtered aluminum in the range 17–1300 eV with improved accuracy and ultrahigh resolution in the L absorption-edge region, J. Appl. Phys. 136, 191901 (2024). https://doi.org/10.1063/5.0233781. [Google Scholar]

Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.

Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.

Initial download of the metrics may take a while.