Open Access
Table 2
Parameters of electrode.
| Variable | Value [μm] | Description |
|---|---|---|
| dH | 0.2 | Metal isolation |
| thickness | 1 | Thickness of metal electrode |
| G_width | 6 | Width of ground electrode |
| S_width | 6 | Width of signal electrode |
| gap | 4 | Electrode spacing |
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