Open Access
Table 1
Roughness values of defined, differently prepared fused silica sample surfaces.
| Fused silica samples |
Rq [μm] |
||
|---|---|---|---|
| Sample nr. | Preparation method | Mean value | Std. Deviation |
| 1 | Polished | 0.001 | 0.000 |
| 2 | Fine ground D35 | 0.289 | 0.038 |
| 3 | Fine ground D64 | 0.438 | 0.130 |
| 4 | Medium ground D64 | 0.728 | 0.134 |
| 5 | Lapped F400 | 0.790 | 0.035 |
| 6 | Rough ground D64 | 0.990 | 0.138 |
| 7 | Lapped F230 | 2.177 | 0.214 |
| 8 | Rough ground D126 | 2.966 | 0.535 |
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