Table 2
Design parameter of the mounting structure. The PSE and RSE in all mounts are the same, because the resulting weight force difference of the lenses is negligible compared to the axial mounting forces and the resulting axial preload. The spring stiffness was calculated with Euler-Bernoulli beam theory. From this design parameters and equation (1) the resulting positioning accuracy could be derived.
| Design parameter | Lens 1 and 3 | Lens 2 |
|---|---|---|
| Lens mass in g | 24 | 20 |
| Static friction coefficient μs | 0.27 | 0.27 |
| Young’s modulus in MPa | 1870 | 1870 |
| PSE parameter | ||
| PSE thickness axial direction in mm | 0.9 | 0.9 |
| PSE thickness radial direction in mm | 3.0 | 3.0 |
| PSE radial spring stiffness in N/mm | 57.9 | 57.9 |
| PSE axial spring stiffness in N/mm | 5.2 | 5.2 |
| RSE parameter | ||
| RSE thickness axial direction in mm | 4.0 | 4.0 |
| RSE thickness radial direction in mm | 0.8 | 0.8 |
| RSE radial spring stiffness in N/mm | 2.8 | 2.8 |
| RSE axial spring stiffness in N/mm | 69.8 | 69.8 |
| Axial preload in N | 2.58 | 2.54 |
| Achievable positioning accuracy in μm | 6.0 | 5.9 |
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