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(a–c) Surface topography of lapped surface measured with WLI magnifications (2.5×, 5×, 10×), (d–f) Calculated surface topography applying the convolution function G1 to lapped surface, (g–i) measured surface topography after PJP. The depicted data are measured at the same position of the sample. The cross sections (k–m) compare the PJP topography to the filtered topography using both convolution functions G1/2.
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