| Issue |
J. Eur. Opt. Soc.-Rapid Publ.
Volume 9, 2014
|
|
|---|---|---|
| Article Number | 14032 | |
| Number of page(s) | 8 | |
| DOI | https://doi.org/10.2971/jeos.2014.14032 | |
| Published online | 15 August 2014 | |
Regular papers
Surface characterization by structure function analysis
Bremer Institut für angewandte Strahltechnik - BIAS, Klagenfurter Str. 2, D 28359 Bremen, Germany
Received:
4
April
2014
Revised:
28
June
2014
The structure function is a tool for characterizing technical surfaces which exhibits a number of advantages over Fourier-based analysis methods. So it is optimally suited for analyzing the height distributions of surfaces measured by full-field non-contacting methods. After the definition of line- and area-structure function and offering effective procedures for their calculation this tutorial paper presents examples using simulated and measured data of machined surfaces as well as optical components. Comparisons with the results of Fourier-based evaluations clearly prove the advantages of structure function analysis.
Key words: Surface measurement / surface representation / structure function / digital signal analysis
© The Author(s) 2014. All rights reserved.
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