Issue |
J. Eur. Opt. Soc.-Rapid Publ.
Volume 4, 2009
|
|
---|---|---|
Article Number | 09030 | |
Number of page(s) | 4 | |
DOI | https://doi.org/10.2971/jeos.2009.09030 | |
Published online | 19 June 2009 |
Regular papers
Guided-wave photodetectors in germanium on optical chips in silicon-on-insulator
1
NooEL - Nonlinear Optics and OptoElectronics Lab, Department of Electronic Engineering, University ’Roma Tre’, Via della Vasca Navale 84, 00146 Roma Italy
2
PGT Photonics, Viale Sarca, 222 Milano - Italy
Received:
26
February
2009
We report the integration of near-infrared waveguide photodetectors in polycrystalline Germanium with Silicon on Insulator optical chips for power monitor applications. We discuss design and fabrication of the devices as well as their characterization in terms of dark current, responsivity and signal to noise ratio.
Key words: germanium / photodetectors / optical chips
© The Author(s) 2009. All rights reserved.
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