Journal of the European Optical Society-Rapid Publications

Application of imaging ellipsometry and white light interference microscopy for detection of defects in epitaxially grown 4H–SiC layers

Elena Ermilova, Matthias Weise and Andreas Hertwig

J. Eur. Opt. Society-Rapid Publ., 19 1 (2023) 23

Published online: 28 April 2023

DOI: 10.1051/jeos/2023018

Elena Ermilova

Matthias Weise

Andreas Hertwig

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