Journal of the European Optical Society-Rapid Publications

Fabrication of low-loss SOI nano-waveguides including BEOL processes for nonlinear applications

H. Tian, G. Winzer, A. Gajda, K. Petermann, B. Tillack and L. Zimmermann

J. Eur. Opt. Soc.-Rapid Publ., 7 (2012) 12032

Published online: 18 August 2012

DOI: 10.2971/jeos.2012.12032

H. Tian

G. Winzer

A. Gajda

K. Petermann

B. Tillack

L. Zimmermann

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