Journal of the European Optical Society-Rapid Publications

Deterministic measurement and correction of the pad shape in full-aperture polishing processes

D. Liao, Q. Zhang, R. Xie, X. Chen, S. Zhao and J. Wang

J. Eur. Opt. Soc.-Rapid Publ., 10 (2015) 15049

Published online: 07 November 2015

DOI: 10.2971/jeos.2015.15049

D. Liao

Q. Zhang

R. Xie

X. Chen

S. Zhao

J. Wang

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