Journal of the European Optical Society-Rapid Publications

Microlens array production in a microtechnological dry etch and reflow process for display applications

T. Knieling, M. Shafi, W. Lang and W. Benecke

J. Eur. Opt. Soc.-Rapid Publ., 7 (2012) 12007

Published online: 22 March 2012

DOI: 10.2971/jeos.2012.12007

T. Knieling

M. Shafi

W. Lang

W. Benecke

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