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Polarization camera based fringe locking system for scanning beam interference lithography

Kevin Treptow, Josias Rühle, Hansen Wu, Christof Pruß, Ingo Ortlepp, Christian Schober, Tobias Haist, Oliver Sawodny, Eberhard Manske, Thomas Kissinger and Stephan Reichelt

J. Eur. Opt. Society-Rapid Publ., 22 1 (2026) 9

Published online: 20 February 2026

DOI: 10.1051/jeos/2026002

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Journal of the European Optical Society-Rapid Publications

Editor-in-Chief: Silvia Soria Huguet - Editorial board
eISSN: 1990-2573

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