Journal of the European Optical Society-Rapid Publications

Effect of sample thickness on etching rate: Simulations and experiments

Anton Savchenko, Christof Pruß, Alois Herkommer and Stephan Reichelt

J. Eur. Opt. Society-Rapid Publ., 21 2 (2025) 52

Published online: 19 December 2025

DOI: 10.1051/jeos/2025049

Anton Savchenko

Christof Pruß

Alois Herkommer

Stephan Reichelt

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