Modelling line edge roughness in periodic line-space structures by Fourier optics to improve scatterometryH. Gross, S. Heidenreich, M-A. Henn, G. Dai, F. Scholze and M. BärJ. Eur. Opt. Soc.-Rapid Publ., 9 (2014) 14003DOI: https://doi.org/10.2971/jeos.2014.14003
