Direct machining of curved trenches in silicon with femtosecond accelerating beamsA. Mathis, L. Froehly, L. Furfaro, M. Jacquot, J. M. Dudley and F. CourvoisierJ. Eur. Opt. Soc.-Rapid Publ., 8 (2013) 13019DOI: https://doi.org/10.2971/jeos.2013.13019
